Buried triple-gate structures for advanced field-effect transistor devices

Amsterdam / Elsevier (2014) [Contribution to a book, Journal Article]

Microelectronic engineering
Volume: 119
Page(s): 95-99

Authors

Selected Authors

Müller, M. R.
Gumprich, A.
Schütte, F.
Kallis, K.
Künzelmann, U.

Other Authors

Engels, S.
Stampfer, C.
Wilck, N.
Knoch, J.

Identifier