Fabrication and Characterization of Nanoelectronic Devices and Circuits


In recent years, the design as well as the manufacturing of modern highly integrated circuits has become extremely complex resulting in a very high specialization of the involved researchers, engineers and technicians. For instance, mastering the manufacturing requires an enormous knowledge of the underlying physical and chemical processes of even the slightest detail in the process flow. As a result, it appears that a communication gap between circuit designers and device engineers is developing that sometimes leads to detrimental misunderstanding.

The goal of this course is to help bridging the gap between circuit design and device engineering. To this end, students will fabricate their own chip with CMOS devices and characterize them in a circuit environment. The fabrication will be carried out by each student within the Central Laboratory for Micro- and Nanotechnology at RWTH Aachen University including optical lithography, wet chemical and reactive ion etching, ion implantation, thermal oxidation as well as physical and chemical vapor deposition of thin films. Parts of the device as well as of the circuits will be designed by the students, thus directly linking device and circuit design parameters as well as the fabrication process to the eventual device and circuit performance.

  Scheme of a transistor IHT RWTH  

Instead of a written test, students are required to write a scientific paper including the theoretical background, the fabrication process, the characterization as well as interpretation of the measurement data. Feedback will be given to the students by the instructor; the final paper will be used for grading the course.

The course takes place every other week for 4.5 hours. Prerequisite to take part is a profound knowledge of semiconductor fabrication technologies as provided in the course Solid State Technology. Due to space limitations in our clean room this course will be limited to approximately 15 students.

Lecture dates and more information at Campus Office.